发明名称 |
Multilayer wiring structure |
摘要 |
A multilayer wiring structure comprising a plurality of groups of patterns each having a multiplicity of wirings formed on the opposite sides of an intervening insulation film. The intervening insulation film is formed with a void exposed to both an upper pattern of a multiplicity of wirings and a lower pattern of a multiplicity of wirings, the upper and lower patterns being formed on and beneath the intervening insulation film and arranged to form a matrix. The void extends longitudinally across one of the patterns, and the upper and lower patterns are connected together through the void at crossing points of the matrix.
|
申请公布号 |
US4426548(A) |
申请公布日期 |
1984.01.17 |
申请号 |
US19820346921 |
申请日期 |
1982.02.08 |
申请人 |
HITACHI, LTD. |
发明人 |
ORITSUKI, RYOJI;WATANABE, TOHRU;SHIRAHASHI, KAZUO;KANAI, HIROMI;ODAWARA, KOZO |
分类号 |
H01L23/522;H01L21/768;H01L29/74;H05K1/00;H05K1/03;H05K3/40;H05K3/46;(IPC1-7):H05K1/14;H05K1/16;H01R4/02 |
主分类号 |
H01L23/522 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|