发明名称 Multilayer wiring structure
摘要 A multilayer wiring structure comprising a plurality of groups of patterns each having a multiplicity of wirings formed on the opposite sides of an intervening insulation film. The intervening insulation film is formed with a void exposed to both an upper pattern of a multiplicity of wirings and a lower pattern of a multiplicity of wirings, the upper and lower patterns being formed on and beneath the intervening insulation film and arranged to form a matrix. The void extends longitudinally across one of the patterns, and the upper and lower patterns are connected together through the void at crossing points of the matrix.
申请公布号 US4426548(A) 申请公布日期 1984.01.17
申请号 US19820346921 申请日期 1982.02.08
申请人 HITACHI, LTD. 发明人 ORITSUKI, RYOJI;WATANABE, TOHRU;SHIRAHASHI, KAZUO;KANAI, HIROMI;ODAWARA, KOZO
分类号 H01L23/522;H01L21/768;H01L29/74;H05K1/00;H05K1/03;H05K3/40;H05K3/46;(IPC1-7):H05K1/14;H05K1/16;H01R4/02 主分类号 H01L23/522
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