| 摘要 |
PURPOSE:To prevent the sharp part of a light guide which forms a reflecting surface from being broken, to improve the precision of the reflecting surface, and to facilitate manufacture by forming the light guide so that a mirror either manufactured by etching or formed separately is the reflecting surface. CONSTITUTION:A crystal substrate of, for example, GaAs which can be etched anisotropically is used as a crystal plate 1', and AlGaAs, etc., are used to form the light guide 2' by liquid-phase growth method, etc. Both have the same anisotropic etching characteristics. The surface of the crystal substrate 1' is coated with a resist film 4 having a pattern partially and the light guide 2' is etched sufficiently with Br2-CH3OH liquid through the pattern part to form a recessed part in a quadrangular pyramid shape. Further, the mirror is fixed to the etched surface. |
