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发明名称
DUENNFILM-TRANSISTOR UND VERFAHREN ZU DESSEN HERSTELLUNG
摘要
申请公布号
DE3226097(A1)
申请公布日期
1983.02.17
申请号
DE19823226097
申请日期
1982.07.13
申请人
SHARP K.K.;JAPAN ELECTRONIC INDUSTRY DEVELOPMENT ASSOCIATION
发明人
TAKAFUJI,YUTAKA;KATO,HIROAKI;FUNADA,FUMIAKI
分类号
G02F1/136;G02F1/1368;H01L21/336;H01L27/12;H01L29/49;H01L29/78;H01L29/786;(IPC1-7):H01L29/78;G02F1/13;H01L21/32;H01L21/84;H01L27/13
主分类号
G02F1/136
代理机构
代理人
主权项
地址
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