| 摘要 |
PURPOSE:To prevent a tracer from colliding against a model, by controlling quick traverse rates in an X and a Y axis directions in a specified state at the time of returning of the tracer to a starting point of profiling, in one way profiling of the surface. CONSTITUTION:When an angle of a profiling direction forming with an X axis is made theta and quick traverse rates in an X axis and a Y axis directions are made FX and FY: X1<Y1, a tracer is fed at the quick traverse rate FX in the X axis direction and fed at a rate F'Y=m.FY which is given by multiplying the quick traverse rate FY by (m) times overriding in the Y axis direction. Thereupon, m(FX/FY).tantheta is given. As a return path TE1-TS1 coincides with a profiling path TS1-TE1 even if a model possesses a protrusion part PTP by doing in this manner, there occurs no collision accident. |
