| 摘要 |
PURPOSE:To miniaturize the titled device and to simplify the production process by providing a transducer and a matching circuit on a piezoelectric thin film. CONSTITUTION:The piezoelectric base plate 9 consists of an elastic base plate 10, a conductive thin film 11 formed on the base plate 10 and a piezoelectric thin film 12 formed on the thin film 11, and a square pattern 13 and a strip line 14 consisting of conductive thin films are formed on said piezoelectric thin film 12, an uppermost layer of the piezoelectric base plate 9. An elastic surface wave element is matched with an external circuit by adjusting the value of a capacitance consisting of the square pattern 13, the piezoelectric thin film 12 and the conductive thin film 11 and the value of indactance consisting of the strip line 14 appropriately. |
