| 摘要 |
PURPOSE:To prevent the deterioration of workability of a defect inspection by a method wherein detector systems are arranged at the vertex of a triangle, and at the place where two chips only are juxtaposed with each other, another chip being arranged at another place is made as the partner of comparison. CONSTITUTION:When the objective lens 11 and the sensor 12 correspond to the chip C, a change-over switch 13 operates automatically to connect the sensor 12 to a comparator 10 through an amplifier 8, and the sensor 4 is cut off from the comparator 10. While, because the objective lens 1 and the sensor 3 correspond to the pattern A at the other vertex of the triangle, the chip C on one side of the part where only the two chips are juxtaposed obtains the chip A as the partner of comparison. Inspection beams 5 to perform raster scanning are irradiated respectively to the respective chips A, C transmitting through the lenses 1, 11, while the beams are not transmitted through the patterns formed with a metal film, the beams transmit the mask 9 only at the outsides of the patterns, and the transmitted beams 6 carrying pattern informations are detected by the sensors 3, 12. The sensors 3, 12 apply the detected signals to a comparator 10 through the amplifiers 7, 8, and the comparator 10 discriminates and determines the difference signal thereof as a defect. Accordingly, the comparison inspection can be attained even when only the two chips are juxtaposed to each other. |
