| 摘要 |
PURPOSE:To prevent the defect of an alumina protective film formed on a magnetic body by forming the magnetic body of a thin film magnetic head by electroforming process and tapering the end face of the magnetic body pattern. CONSTITUTION:A foundation insulating film 2 and a plating foundation film 9 are formed on a substrate 1, surface-sensitive type photo resist is spin coated and prebaking is made. Then, after exposure, developed and a photo resist frame 10 is formed. The sectional form of the frame becomes inverted taper. A magnetic body is electro-deposited in a magnetic body plating solution on the part other than the frame, and the photo resist frame is removed. The exposed plating foundation film 9 is removed by ion milling. Unnecessary magnetic body 3' plated on the part other than the magnetic body 3 is etched using photo resist 12 slightly larger than the size of the magnetic body 3 as a mask to remove the photo resist and a lower magnetic body 3 is formed. The end face of the completed lower magnetic body becomes cone angle of 70+ or -10 deg..
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