发明名称 |
Method for manufacturing semiconductor device. |
摘要 |
<p>A semiconductor device is manufactured by selectively removing an insulating film (28) which covers at least one conductive layer (24, 26, 27) to form at least one contact hole (29) partially exposing the conductive layer (24, 26, 27). Then, a layer of an inorganic conductive material having a melting point lower than the material comprising the conductive layer (24, 26, 27) is formed on a surface of the insulating film (28) and is melted to fill the contact hole (29) with the inorganic conductive material. Finally a wiring layer (32) is formed in contact with the inorganic conductive material filled in the contact hole (29).</p> |
申请公布号 |
EP0097848(A1) |
申请公布日期 |
1984.01.11 |
申请号 |
EP19830105623 |
申请日期 |
1983.06.08 |
申请人 |
TOKYO SHIBAURA DENKI KABUSHIKI KAISHA |
发明人 |
OKUMURA, KATSUYA;SHINKI, TOSHINORI;SATO, TAKASHI;UEDA, MASAAKI |
分类号 |
H01L21/3205;H01L21/28;H01L21/285;H01L21/768;(IPC1-7):01L21/285 |
主分类号 |
H01L21/3205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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