| 摘要 |
PURPOSE:To reduce remarkably the process such as vapor deposition, by forming one of a drive electrode of a crystal oscillator on a substrate in advance for forming an air gap electrode and having only to form an adaptive electrode on the other surface only of the crystal chip. CONSTITUTION:Support patterns 3b, 3c and 7b, 7c supporting the crystal chip 4 are laminated and the air gap electrode 3a and one major plane 4a of the crystal chip 4 are opposed with an air gap corresponding to several tens of mum of the thickness of a conductor layer 7. The adaptive electrode 5 being the other drive electrode is provided on the other major plane 4b of the crystal chip 4 with vacuum deposition. The crystal chip 4 is mounted on the support patterns 7b, 7c, fixed with a conductive adhesives 8 and supported with the substrate 2. |
