| 摘要 |
PURPOSE:To execute a spin process of a photo-mask, etc. under a non-contact state by forming an air jet to the circumference of a rotary bearing and ejecting an air jet in the tangential direction of a circle in the rotary bearing used for rotary treatment for the photo-mask, a wafer, etc. CONSTITUTION:The spin air bearing 11 is prepared by a block made of Teflon or vinyl chloride of acid resistance and alkali resistance, and an air intake 14 is formed to the lower section of the block. A horizontal path 15 and a plurality of inclined paths 15a directed in the oblique upward direction from the path 15 are formed to the intake 14, and the air jets 12 or 13 are formed at the noses of the paths. According to such constitution, the mask being forwarded to the bearing 11 is received by air from the jet 13 first, and the mask and a circle drawn by the jet 12 are made concentrical. The jet stream from the jet 13 is stopped, air from the jet 12 is blown off, and the mask is given with revolution while being floated up. |
