| 摘要 |
PURPOSE:To improve the manufacturing yield and the working efficiency by a method wherein the discriminating information of non-defective or defective is recorded in a matter other than pellets and then reproduced by a post process. CONSTITUTION:A plurality of needle electrodes 14 in a prober device are arranged on the pellet 13 to be measured of a semiconductor wafer 12. A sub stage 15 is joined to a measurement side stage 11 and performs the same actions as the measurement side stage 11. The characteristic of each pellet 13 to be measured is successively measured; when it is judged as a defective pellet, marking is performed by depositing ink 18 on a monitor 16 by means of an inker needle 17. In an assembly process, the monitor paper 16 is tried on a reproduction detector to detect the position of defective pellets. Since the ink 18 is not deposited on the pellet 13 to be measured and the needle electrodes 14, the washing working, etc. of the ink 18 when measurement is not normally performed are unnecessitated, and there is no possibility of cracks of the semiconductor wafer 12. |
