| 摘要 |
PURPOSE:To obtain a moistened atmosphere gas having always a stable dew point, by controlling the supply rate of the wet atmosphere gas so that the dew point of the mixed atmopshere gas of the wet and dry atmosphere gases attains a prescribed value. CONSTITUTION:A dry atmosphere gas from a gas generator 1 is heated with a heater 2 and is supplied to a mixer 3. Part of said gas is supplied through a regulating valve 4 to a hermetic storage tank 5 for water where the gas bubbles in hot water 7 to form a wet atmosphere gas. After said gas is superheated with a heater 8, the gas is supplied to a mixer 3. The dew point of the mixed atmosphere gas is detected with a dew point meter 9, and a flow rate control valve 10 of the wet atmospher gas is controlled so that said dew point attains a prescribed value. A temp. controller 13 controls a heater 11 with an electric power regulator 14 in accordance with the value of the hot water temp. detected with a thermocouple 12, whereby the water temp. is maintained at a prescribed value. A regulator 14 is further operated by the signal of a rate setter 16 in accordance with a gas flowmeter 15 to maintain the constant water temp. |
