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发明名称
摘要
申请公布号
FR2351500(B1)
申请公布日期
1984.01.06
申请号
FR19770012473
申请日期
1977.04.18
申请人
DATA GENERAL CORP
发明人
分类号
H01L29/872;H01L21/263;H01L21/285;H01L21/318;H01L29/47;(IPC1-7):01L21/283;01L21/88
主分类号
H01L29/872
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代理人
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