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经营范围
发明名称
PHOTO HEATING DEVICE
摘要
申请公布号
JPS59928(A)
申请公布日期
1984.01.06
申请号
JP19820108533
申请日期
1982.06.25
申请人
USHIO DENKI KK
发明人
SHIMIZU HIROSHI
分类号
H01L21/26;C23C16/48;C23C16/56;C30B25/10;C30B33/00;F27B5/16;F27B17/00;H01L21/268;H01L21/31;H05B3/00
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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