发明名称 METHOD OF PRODUCING COPPER CONDUCTOR MULTILAYER STRUCTURE
摘要 A method for producing a multilayered glass-ceramic structure with copper-based conductors therein, includes firing a multilayered structure, in which copper-based patterns and glass-ceramic layers are alternately laminated, in an inert atmosphere containing water vapor, the partial pressure of which is from 0.005 to 0.3 atmosphere. The temperature multilayered structure is fired at a temperature at which a thermally depolymerizable resin binder, contained in the glass-ceramic green sheets, is depolymerized and eliminated, but its glass components and the copper exhibit substantially no change in their state. The method also includes raising, in an inert atmosphere without water vapor, the firing temperature at which particles of the glass components coalesce, but the metallic state of copper is not affected.
申请公布号 JPS59995(A) 申请公布日期 1984.01.06
申请号 JP19820101990 申请日期 1982.06.16
申请人 FUJITSU KK 发明人 KAMEHARA NOBUO;KURIHARA KAZUAKI;NIWA KOUICHI
分类号 H05K3/46;B32B15/04;H01L21/48;H01L23/15;H01L23/498;H05K1/03;H05K3/16 主分类号 H05K3/46
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