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发明名称
摘要
申请公布号
JPS59130(B2)
申请公布日期
1984.01.05
申请号
JP19780140009
申请日期
1978.11.14
申请人
SHINGIJUTSU KAIHATSU JIGYODAN
发明人
SUGANO TAKUO;YAMAZAKI KIMYOSHI
分类号
G01N27/20;G01N27/22;G01N27/24;H01L21/66
主分类号
G01N27/20
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