| 摘要 |
PURPOSE:To decrease processes than useal and to obtain a magnetic sensor of without exfoliation of an electrode and corrosion deformation, etc. of MR element, by forming a larger stripe width of a magnetoresistance effect (MR) element than that of a metal thin film for the electrode at each part on a substrate. CONSTITUTION:A magnetic material 1' consisting of permalloy, etc. is stacked on the substrate 3, and a metal electrode material 2' such as Al is stacked thereon, and an Al electrode 2' is formed under a pattern 4' using negativeresist firstly. An alkaline etching liquid which doesn't etch the material 1' but etches Al is used in this etching. The resist 4' is then removed and a wider positiveresist 6 is formed on the material 1' than that of the electrode pattern 2' by removing the resist 4', and a patterning of MR element is performed. An acidic etching liquid is used in etching the material 1' in this time. Thereby, MR element is obtained in good yield without exfoliation of the Al electrode film 2' during the etching of the material 1' and without disconnection, etc. of the material 1' during the etching. |
