发明名称 Crossed-field velocity filter and ion-beam processing system.
摘要 <p>A cross-field velocity filter for separating ions having a predetermined velocity comprises a pair of electrodes (11, 12) for producing a radial electric field and a pair of pole pieces (13, 14) for producing a magnetic field which crosses the electric field so that the crossed-field velocity filter has the same focusing properties for an ion beam in both the direction of the electric field and the direction of the magnetic field.</p>
申请公布号 EP0097535(A2) 申请公布日期 1984.01.04
申请号 EP19830303594 申请日期 1983.06.22
申请人 FUJITSU LIMITED 发明人 ITAKURA, TORU
分类号 H01L21/265;H01J37/05;H01J37/153;H01J49/46;H01L21/027;H01L21/302;H01L21/3065;(IPC1-7):01J49/46 主分类号 H01L21/265
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