Process for preparing trichlorosilane and silicon tetrachloride from silicon and hydrogen chloride

摘要

An agitated bed operation in production of trichlorosilane and silicon tetrachloride from metallic silicon or metallic-silicon-containing solid materials and hydrogen chloride is disclosed. In the new agitated bed operation in a tower type reactor, defects and disadvantages of the conventional fixed bed operation and conventional fluidized bed operation are eliminated.