发明名称 PLASMA GENERATOR AND METHOD OF GENERATING PLASMA WHICH IS CONTROLLED ACCURATELY
摘要 A plasma generating system comprises a plasma gun (10) including a hollow cylindrical anode member (24D), a hollow cylindrical intermediate member (26) electrically isolated from and juxtaposed coaxially with the anode member to form a plasma-forming gas passage (28) through the intermediate member and the anode member, and an axially movable cathode member (20). The intermediate member comprises tubular segments (24A-C) separated by resilient insulating spacing rings (30A-C) held in compression. Arc radiation is blocked from the spacer rings by meanders (90) in the inter-segment slots and further by ceramic barrier rings. An electric motor or pneumatic piston responsive to a measurement of arc voltage continually adjusts the axial position of the cathode tip relative to the anode nozzle (14) so as to maintain a predetermined arc voltage.
申请公布号 JPS6340300(A) 申请公布日期 1988.02.20
申请号 JP19870145435 申请日期 1987.06.12
申请人 PERKIN ELMER CORP:THE 发明人 TOOMASU EFU BERUNETSUKI;KEBUIN JIEE BUAAREI;UIRIAMU PII RATSUSHIYU;JIYON EFU KURAIN;CHIYANDORA BUHANSARI;JIYANUSU URODAATSUITSUKU
分类号 C23C4/12;H05H1/34;H05H1/36;H05H1/42 主分类号 C23C4/12
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