发明名称 |
PLASMA GENERATOR AND METHOD OF GENERATING PLASMA WHICH IS CONTROLLED ACCURATELY |
摘要 |
A plasma generating system comprises a plasma gun (10) including a hollow cylindrical anode member (24D), a hollow cylindrical intermediate member (26) electrically isolated from and juxtaposed coaxially with the anode member to form a plasma-forming gas passage (28) through the intermediate member and the anode member, and an axially movable cathode member (20). The intermediate member comprises tubular segments (24A-C) separated by resilient insulating spacing rings (30A-C) held in compression. Arc radiation is blocked from the spacer rings by meanders (90) in the inter-segment slots and further by ceramic barrier rings. An electric motor or pneumatic piston responsive to a measurement of arc voltage continually adjusts the axial position of the cathode tip relative to the anode nozzle (14) so as to maintain a predetermined arc voltage. |
申请公布号 |
JPS6340300(A) |
申请公布日期 |
1988.02.20 |
申请号 |
JP19870145435 |
申请日期 |
1987.06.12 |
申请人 |
PERKIN ELMER CORP:THE |
发明人 |
TOOMASU EFU BERUNETSUKI;KEBUIN JIEE BUAAREI;UIRIAMU PII RATSUSHIYU;JIYON EFU KURAIN;CHIYANDORA BUHANSARI;JIYANUSU URODAATSUITSUKU |
分类号 |
C23C4/12;H05H1/34;H05H1/36;H05H1/42 |
主分类号 |
C23C4/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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