发明名称 |
Electron beam apparatus |
摘要 |
An electron beam apparatus comprises an electron gun having a cathode consisting of single-crystal lanthanum hexaboride and a plurality of electron lenses for projecting the cross-over image of an electron beam emitted from the electron gun as a reduced-scale image onto a sample. It further comprises a circuit for measuring the brightness and shape of the cross-over image projected onto the sample and the emission pattern of the electron beam emitted from the electron gun, and a circuit for applying a bias voltage, with which the cross-over image has a desired brightness and is round and the emission pattern is anisotropic, to the electron gun.
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申请公布号 |
US4424448(A) |
申请公布日期 |
1984.01.03 |
申请号 |
US19800216948 |
申请日期 |
1980.12.16 |
申请人 |
TOKYO SHIBAURA DENKI KABUSHIKI KAISHA |
发明人 |
TAKIGAWA, TADAHIRO;SASAKI, ISAO |
分类号 |
H01J37/06;H01J37/26;H01J37/304;(IPC1-7):H01J3/08;H01J3/12 |
主分类号 |
H01J37/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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