| 摘要 |
PURPOSE:To conduct precisely the control of a pulse waveform by a method wherein a current is detected between an inverter and discharge electrodes, the detected signal is differentiated by a differentiator and a converter is controlled. CONSTITUTION:Feeder wirings 9 between an inverter 7 and a transformer 8 is provided with a high-frequency current detector 10 and this detected signal is differentiated by a differentiator 11. A differentiated value from this differentiator 11 is added to a command signal from a DC power command device 12. This added signal is compared with a signal from a DC voltage detector 13 between a smoothing circuit and the inverter and the error signal is amplified by an error amplifier 14 to control the phase of an electric switch of a converter 3, whereby a DC voltage is controlled. On the other hand, after boosting its voltage to several times by the transformer 8, an AC power converted by the converter 7 is made to perform an impedance matching between a power supply and a load by a matching circuit 15. The matched AC voltage is applied to discharge electrodes 17 and 18 for exciting laser medium gas 16 to generate a discharge and to feed an excitation energy to the gas 16. Thereby, with the precise control of a pulse waveform made possible, a pulsed laser can respond swiftly to a pulse of a high-repetition frequency as well. |
