Dual axis capacitive inclination sensor

摘要

A dual axis capacitive inclination sensor includes a flat cylindrical vial defined by a lower conductive half and an upper dielectric half with a chamber therebetween containing a dielectric liquid with a bubble therein. A top surface of the upper half has two pairs of axis capacitor plates positioned thereon in spaced relation to two mutually perpendicular horizontal inclination axes, and each of the axis plates forms a capacitor in cooperation with the lower half which functions as a common capacitor plate. Inclination of the vial about one or both of the inclination axes causes a change in the position of the bubble with respect to the capacitive system, thereby changing the capacitance between the plates. Each of the axis capacitor plates has a shape defined by a circumferentially extending web portion having inwardly directed radial portions connected at the opposite ends of the web. The radial portions are tapered in the direction toward the center of the vial in order to maximize the linearity of response of the sensor.