| 摘要 |
PURPOSE:To obtain an aluminium nitride sintered body providing high heat conductivity and superior mechanical strength to electronic parts by constituting an aluminium nitride sintered body contg. a specified amt. of rare earth metal oxide and regulating the amt. of residual carbon and oxygen. CONSTITUTION:A heat conductive AlN sintered body is constituted of a sintered body consisting of a primary phase consisting of AlN, <=5wt.%, pref. <=3vol.% oxide of a rare earth element (pref. Dy, Y) as second phase, and contg. <=0.1 and <=1wt.% residual carbon and O, respectively. The sintered body has >=180W/m.k heat conductivity, and is used as a material for parts constituting a heat conducting part of electronic parts or for constituting heat radiating part thereof. The sintered body is prepd. by sintering AlN powder contg. 0.5-13wt.% rare earth element oxide and <=1wt.% carbon per 100wt.% said AlN powder, at 1700-2000 deg.C in inert gas atmosphere after mixing and molding the mixture of the AlN powder with the rare earth element oxide and carbon. |
