摘要 |
PURPOSE:To obtain a sensor characterized by high accuracy and strong shock resistance, by contacing a tool, detecting change in flow rate or pressure of fluid in a pipe, which is caused by the deformation of the pipe in correspondence with the change in displacement of a contact piece, and indicating the position of the tool. CONSTITUTION:When machining for a specified amount is finished and a tool measuring command is issued by a numerical control device and the like, a tool W is moved to a measuring position where a touch sensor is provided from a machining position. Then, the tool W is moved to a sensor part 10 by a sepcified distance for measurement. Then, the tip of the tool is contacted with a contact piece 13 of the sensor part 10 and pushes it down by a specified amount. When the contact piece 13 is displaced, a pipe 11 is deformed, and its cross sectional area is changed. Therefore, the flow rate or pressure at the downstream of the sensor 10 is changed. A detector 4 detects the change and transduces the result into an electric signal. The signal is indicated on a display part 5. |