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发明名称
APPARATUS FOR LIQUID PHASE EPITAXIAL GROWTH
摘要
申请公布号
JPH0234593(A)
申请公布日期
1990.02.05
申请号
JP19880184340
申请日期
1988.07.22
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
ISHIGURO NAGATAKA
分类号
C30B19/06;H01L21/208
主分类号
C30B19/06
代理机构
代理人
主权项
地址
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