CRYSTAL OSCILLATION TYPE FILM THICKNESS MONITOR,申请号JP19820105669-传众专利搜索

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发明名称	CRYSTAL OSCILLATION TYPE FILM THICKNESS MONITOR
摘要
申请公布号	JPS58223009(A)	申请公布日期	1983.12.24
申请号	JP19820105669	申请日期	1982.06.18
申请人	NIPPON JIDOSHA BUHIN SOGO KENKYUSHO KK	发明人	TAGUCHI TAKASHI;SATOU SUSUMU;HATSUTORI TADASHI
分类号	G01B17/02;C23C14/54	主分类号	G01B17/02
代理机构		代理人
主权项
地址

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