| 摘要 |
<p>PURPOSE:To measure the reflectivity of the entire area of a mirror surface, by mounting two tables, which can be moved in the vertical direction each other; a table, which is rotated around a vertical axis with respect to the moving direction; and a sample holder, which can be rotated with a linking rod as an axis, on a base table. CONSTITUTION:On a base table 5, an A table 6, which is slidden in a fan shape with an A axis as a center, a Z table 7, which can be moved in the Z direction, and an X table 8, which can be moved in the X direction, are mounted. A sample holder 10 is attached to the X table 8 through a linking rod 9. The sample holder 10 can be rotated in the B direction with the linking rod as an axis. The reflectivity of a sample 12 is measured by a reflectivity measuring system 13. In order to measure the reflectivity of the sample 12 at an arbitrary point, the point to be measured is brought on an optical axis by 4 axis contrl. This control is performed by moving the X and Z tables, rotating the A table, and rotating the linking rod. In this method, the spatial distribution of the reflectivity can be measured even for a spherical mirror.</p> |
