| 摘要 |
PURPOSE:To form a thin uniform wax layer on the wafer by applying DC high voltage between a spray nozzle for a solution and the wafer and atomizing wax by using compressed air. CONSTITUTION:An organic solvent solution of wax is made contain in a pressure-resisting vessel 1, and the spray nozzle 2 is set up. The wafer 8 is placed on a fixed base 3, and a DC high voltage applying device 4 and a compressed air feeder 5 are set up. A wax solution in the vessel 1 is atomized toward the wafer 8 of a lower section from the nozzle 2 by compressed air from the device 5. The pressure is regulated by a regulating valve 6. DC high voltage is applied between the nozzle 2 and the wafer 8 by the operation of the device 4 at the same time as the atomizing. Accordingly, the thin uniform wax layer can be formed onto the wafer 8. |
