| 摘要 |
PURPOSE:To prevent the leakage and exudation of a material from a boat for vapor deposition having a double boat structure composed of a top cover, an inner cover and a bottom cover, by cutting a groove around the material reservoir of the bottom cover boat and by attaching a return bent part corresponding to the groove to the inner cover boat. CONSTITUTION:A boat for vapor deposition is composed of a bottom cover boat 1, an inner cover boat 2 and a top cover boat 3, and a material reservoir 5 for holding a material for vapor deposition is formed in the boat 1. Vapor holes 2a, 3a through which an evaporated material flies out are pierced in the boats 2, 3. A groove 6 is cut around the reservoir 5 of the boat 1, a return bent part 7 corresponding to the groove 6 in the boat 1 is attached to the boat 2, and the part 7 is fitted to the groove 6. |
