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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS58220447(A)
申请公布日期
1983.12.22
申请号
JP19820103032
申请日期
1982.06.17
申请人
TOKYO SHIBAURA DENKI KK
发明人
CHIBA MITSUNAO
分类号
H01L21/3205;H01L21/306
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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