| 摘要 |
PURPOSE:To unnecessitate an observation window to be installed on a crucible and make uniform the temperature distribution of a semiconductor material within the crucible by a method wherein a reflecting substance such as a triangular prism is provided on the semiconductor material, and a window through which a light reflected from the reflecting substance is observed is provided when a thin band is manufactured by melting a semiconductor device material by an induction heating method followed by rapid cooling thereof. CONSTITUTION:A graphite crucible 2 with a semiconductor material in it is placed in an air-tight vessel 11 that consists of an insulator material, and a high-frequency coil 3 is wound round the crucible. Furthermore, an inert gas such as argon is introduced into the vessel 11 through its inert gas inlet tube 13, and argon gas is also introduced into a hollow fixture jig 9 through its gas inlet tube 7. Further, a triangular prism 18 fixed with a fixture 17 and an observation window 19 that is opposite to the prism are provided on the upper end of the jig 9. Infra-red light emerging from the window 19 is measured by a radiation pyrometer 14. With this arrangement, the jig 9 is lowered by means of a cylinder rod 10 actuated by an air cylinder to jet out the molten liquid from a a nozzle 8, while the melting state of the material 1 is observed. |
