| 摘要 |
PURPOSE:To improve the contrast of the final image on a phosphor plate by providing a light weight element layer consisting of a reflected electron and a material with low secondary electron generation efficiency on the inner surface of a pipe for preventing the reflected electron to which wave front work is applied. CONSTITUTION:A transmission type electron microscope is formed by providing a pipe 5 for preventing a reflected electron made of opaque steel material that applies uneven wave front work inside a vacuum shielded pipe 4 and firmly coating the surface of the inside and the inner wall surface of an observation room 11 with a light weight element layer 12 that mixes carbon powder and an adhesive agent. Besides, the electron beam 1 focused by an electron lens 2 focuses a focal point 3 and is diffused again and then generates the transparent image of a sample on a phosphor plate 7. As a result, the quantity of reflected electron beam generated when the electron beams collide with one after another by the light weight element layer 12 can sharply be reduced and the contrast of the final sample image can be improved. |
