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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH0411748(A)
申请公布日期
1992.01.16
申请号
JP19900112655
申请日期
1990.04.30
申请人
NEC CORP
发明人
SATO MEGUMI
分类号
H01L21/82;H01L21/66
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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