| 摘要 |
PURPOSE:To facilitate the analysis on the deficiency in the testing of direct current with a higher measuring accuracy of an AC testing output signal by arranging a means of supplying a DC power source voltage and an AC testing driving signal to an element through a contactor while performing an AC test with a semiconductor substrate electrode earthed. CONSTITUTION:In a DC test (b), a DC testing stylus 50 is set at an element A1 and transmits or receives DC testing input/output signals through a DC test input/output line 51 to determine acceptance or rejection thereof, which can reduce the rising time of the DC testing output signal remarkably to about 1/22. As a terminal SUB is not earthed, no leak current flows thereby facilitating the analysis on the position of rejection. With a judgement of acceptance, the element A1 is shifted to the position of an element A2 and an AC testing stylus 53 is set to perform an AC testing (a). A buffer amplifier 24 and a pulse driver 23 are provided on circuit board approaching the position of the AC testing stylus 53 as much as possible thereby preventing deterioration in the signal- noise of the AC testing output of an element, ultimately improving the measuring accuracy. |
