| 摘要 |
PURPOSE:To simplify automatic carrying for a member to be treated such as a photo-mask, and to execute excellent treatment positively and rapidly by setting up one cell in response to each treatment and forwarding fluids, such as air for drying, a treating liquid or wash water or the like in the horizontal direction in the cells by treaters installed one by one for each treatment. CONSTITUTION:A necessary number of the devices 23 are arranged in the horizontal direction in response to the treatment (drying, development or washing by water) of substrate glass. The cells 20 are placed on the devices 23 in the relationship of 1:1. When first treatment is completed and a glass substrate must be forwarded to the device 23 for second treatment, a rack 21 is fitted into the trapezoid concave section 22 of the second cell 20 by an air cylinder controlled by a micro-computer, and the second device 23 starts a predetermined process. The rack 21 is moved to the third, fourth and fifth cells in succession. A novel substrate 1 is set to the rack 21 to which all processes are completed, and the rack 21 is arranged at the cell of a left end. A wire, an arm, etc. controlled by the micro-computer may be used for driving the rack 21. |
