| 摘要 |
PURPOSE:To obtain the solar battery having excellent reliability and durability by a method wherein a light-transmitting resin layer is formed on the side of the light-receiving surface of the solar battery having a thin film semiconductor layer, and the light- receiving surface of the solar battery is protected from damage and corrosion by merely adding a simple constitution. CONSTITUTION:An amorphous Si layer, consisting of a P-layer, an I-layer and an N- layer, is deposited in single layer or multilayer on the substrate 5 consisting of stainless, ceramic, glass and the like by performing plasma discharge and the like. A transparent conductive layer 7 is formed on the region, which is corresponding to each solar batter element having a small area, located on the surface of an Si layer 6. Said transparent conductive layer 7 consists of ITO, SnO2 and the like, and the film is formed by performing a vacuum evaporation, a spraying method and the like. A pattern is formed when film is formed using a prescribed metal mask, or after a transparent conductive layer has once been formed, and the resist mask of a prescribed pattern is formed using a photoetching technique and the like. Subsequently, a transparent conductive film 7 of the prescribed pattern is formed using an etching solution such as hydrofluoric acid, hydrochloride acid and the like, and the unnecessary resist mask is removed. |
