| 摘要 |
PURPOSE:To improve the yield of fine particulate oxide consisting essentially of SiO2, etc. formed of a flame while the growth surface of a target material under rotation or a porous base material under growth is electrified with ions and to reduce the cost of production by adsorbing said oxide to said growth surface. CONSTITUTION:A porous base material 1 is pulled upward as said material is grown by sooting while the material 1 is kept rotated. A raw material such as SiCl4 is supplied in a vapor phase from a multicored oxyhydrogen burner 2 and an oxyhydrogen flame 8 is made during this time. The fine oxide particles formed by hydrolysis of the above-described gaseous raw material are blown to the forward end of a quartz bar or the like as a target, to grow the material 1 in the axial direction. Positive ions concentrate at the forward end part of the flame 8 in this case and tend to deposit on the growth surface at the peak of the material 1, but the gas contg. the negative ions dissociated by an ion generator 3 more than the peripheral air is electrified on the top end face of the material 1 and is neutralized in said part by the adsorption of the fine oxide particles, etc. consisting essentially of SiO2, etc. contained in the forward end part of the flame 8. In other words, the electrification and adsorption are accomplished continuously by the rotation of the material 1, whereby the material 1 is grown. |
