PRODUCTION OF PYRAMID-SHAPED MICRO PRESSER

摘要

PURPOSE:To produce a titled micro presser easily with high accuracy, by generating pyramidal projections of a prescribed size by anisotropic etching on a single crystal Si plate of a single- or double-faced mirror then cutting out the presser therefrom. CONSTITUTION:Alcohol having a higher mol. wt. than isopropyl alcohol is added to an aq. soln. of alkali metal hydroxide to prepare a liquid mixture. A single crystal Si plate 1 of a single or double faced mirror, for example, a single crystal Si plate 1 of (100) face bearing is anisotropically etched to generate many pyramidal projections 2. The projection 2 part having a prescribed size among the projections 2 is cut out by dicing or the like, whereby a micro presser having an extremely small radius of curvature is produced.