ORGANIC COMPOSITE MATERIAL

摘要

PURPOSE:To improve the adhesivity of a coating film to an organic material used as the substrate by pretreating the substrate with plasma of a gas such as argon or hydrogen before forming a coating film by a plasma CVD process and sputtering the substrate with the ion of the above inert gas, thereby cleaning the surface of the substrate. CONSTITUTION:A coating film is formed on the surface of an organic material having unsaturated carbon bond by a plasma CVD process using a compound expressed by formula SixC1-x (0<=x<=1) together with hydrogen and a halogen element such as fluorine.