PRODUCTION OF ALUMINUM NITRIDE SUBSTRATE

摘要

PURPOSE:To enable the control of an atmosphere at the time of firing without using a firing vessel and to prevent the occurrence of defects such as warp and cracks in aluminum nitride substrates. CONSTITUTION:Green sheets 1 of aluminum nitride and a frame material 2 are subjected to binder removing treatment and the frame material 2 is calcined. Each of the green sheets 1 is put in the frame material 2 and the sheets 1 are superposed while holding each of the sheets 1 and the frame material 2 between setters 4 made of boron nitride. The sheets 1 are then fired.