| 摘要 |
PURPOSE:To provide an adjusting method whereby no position displacement is generated even when frictional external force is applied to act, in the position adjusting method for a polished member. CONSTITUTION:In a sample table in which a position of a polished member 6 can be adjusted by action of rotational feeding a screw 5, by removing a twist amount of the screw accumulated in an adjusting process, no position displacement is generated even when external force acts at the time of polishing. Since polishing work is performed after eliminating residual stress provided in an adjusting mechanism, the high accurate polishing work can be realized with no position displacement of the polished member. |
