| 摘要 |
PURPOSE:To compensate deterioration of accuracy due to the variation of a moving object and the irradiating angle of a laser light beam, by dividing the laser light irradiated to the moving object into two beams, and keeping the angle of each beam constant. CONSTITUTION:Laser light generated from a laser generator 2 is split into two directions by a beam splitter 3c, one is led to a microlens 5a through a beam splitter 3a and an optical fiber 4a, and the other is led to a microlens 5b through a beam splitter 3b and an optical fiber 4b. Laser light is irradiated through two microlenses 5a, 5b on a moving object 1a, respectively, at an angle inclined by alpha of a constant value in each opposite direction against a perpendicular line (q) in the moving direction of the moving object 1a. In this way, deterioration of accuracy due to a variation of the moving object 1a and the irradiating angle of the laser light beam can be compensated by keeping the angle of the beam constant. |
