| 摘要 |
PURPOSE:To execute a measurement with high reliability by adjusting an inherent vibration number with high accuracy, by forming a thin and platelike pedestal to which a piezoelectric element is installed, and piercing one or more holes on this platelike pedestal so that the prescribed number of inherent vibrations is obtained. CONSTITUTION:An aluminum case 204 has an inside diameter of 16mm., a platelike pedestal is formed as one body with the case and has 0.6mm. thickness and four holes whose hole diameter is 1.8mm. are pierced by dividing equally on a pitch circle of 12.5mm. on this platelike pedestal. Subsequently, an inherent vibration number of such an acceleration sensor is measured, and the hole diameter and the vaviation rate of the inherent vibration number in case when said hole diameter is enlarged are measured. As a result, by correcting said hole diameter of said acceleration sensor, the prescribed inherent vibration number can be obtained. In this way, the measurement having high reliability can be executed by adjusting the inherent vibration number with high accuracy. |
