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发明名称
SURFACE PROFILE ADAPTED FOR TRANSFERRING HEAT FROM THIN AND SOFT PRODUCT
摘要
申请公布号
JPS58213440(A)
申请公布日期
1983.12.12
申请号
JP19830090839
申请日期
1983.05.25
申请人
VARIAN ASSOC
发明人
SUKOTSUTO SHII HOORUDEN
分类号
H01J37/317;H01J37/00;H01J37/20;H01L21/203;H01L21/265;H01L21/31;H01L21/67;H01L21/68;H01L21/683
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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