| 摘要 |
PURPOSE:To prevent a step from being formed between a lower core and an insulating layer including a coil which is formed on the lower core by arranging the 2nd lower core on said lower core opposed to an upper core. CONSTITUTION:The 1st and 2nd lower cores 11, 12 are formed by highly conductive permalloy. Respective insulating layers 13-15 and respective coil parts are formed by SiO2 and Al. The 2nd core part 12 is formed on the lower core 11 by the thickness corresponding to the whole thickness of the insulating layers 13-15 through the mask of the insulating layers 13-15 by electrodeposition. At that time, it is prevented to form a step between the surface of the lower core 12 and the surface of a part of the insulating layer 15 which does not include the lower coil part. Consequently, the upper core 19 formed in common on the lower core 12 and the insulating part 15 through a spacer 18 is sufficiently insulated from the coil parts 16, 17 by the insulating layers 14, 15. |
