| 摘要 |
PURPOSE:To perform diffraction and convergence simultaneously by forming uneven-interval gradings on plural single-crystal flat plates which are different in surface crystal direction, bit by bit, by anisotropic etching and obtaining different-angle reflective diffraction surfaces. CONSTITUTION:Si single-crystal flat plates 3-5 which differ in surface cyrstal direction, bit by bit, are arranged fixedly on an Si substrate 1 with an adhesive 2, and the surfaces are polished. The surfaces are coated with photoresist 6 and the anisotropic etching is carried out after exposure and development; and the remaining photoresist is removed and then a reflective film 7 is formed over the surface to manufacture the uneven-interval plane gratings 10. The size of single crystal plates 3-5 are determined corresponding to a prescribed blaze angle. The diffraction gratings 10, an optical transmission line 9, and input and output optical fibers 11 and 12 are arranged on a substrate 8. Light 13 incident from the input fiber 11 to the diffraction grating 10 is diffracted and the polarized light of every wavelength is converged to the output fiber 12. |
