VAPOR DEPOSITION DEVICE,申请号JP19820093214-传众专利搜索

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发明名称	VAPOR DEPOSITION DEVICE
摘要
申请公布号	JPS58210843(A)	申请公布日期	1983.12.08
申请号	JP19820093214	申请日期	1982.06.02
申请人	HITACHI SEISAKUSHO KK	发明人	INOUE HIRONORI;AOYAMA TAKASHI;SUZUKI TAKAYA
分类号	C30B25/02;B01J19/00;C23C16/54;C30B25/12;H01L21/02	主分类号	C30B25/02
代理机构		代理人
主权项
地址

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