发明名称 PATTERN INSPECTION APPARATUS
摘要 PURPOSE:To equivalently improve memory speed and scanning speed by sequentially fetching a signal shifted out from each low speed memory to the shift registers and by judging normality of pattern to be inspected. CONSTITUTION:Numeral 8 indicates a high speed memory and binary coded signals obtained as a result of scanning change the terminals 72-75 of multiplexer 7 for each scanning of one line and are then sequentially stored in the memory cells 81-84. When these are stored up to the memory cell 84, these are stored again from the memory cell 81 and these memory cells 81-84 are used repeatedly. Meanwhile, when the signals are stored in the memory cells 81 and 82, the signals of scanning one line are respectively stored in the memory cells 511, 521 through the terminals 912, 922 of the multiplexers 91, 92. Thereafter, the signals of these memory cells 511, 521 are sequentially shifted to the next memory cells 512, 522.
申请公布号 JPS58210623(A) 申请公布日期 1983.12.07
申请号 JP19820093896 申请日期 1982.06.01
申请人 FUJITSU KK 发明人 SERIZAWA JIYOUJI;FUJIWARA KATSUMI
分类号 H05K3/00;G01N21/88;G01N21/956;H01L21/027;H01L21/30;H01L21/66 主分类号 H05K3/00
代理机构 代理人
主权项
地址