摘要 |
PURPOSE:To equivalently improve memory speed and scanning speed by sequentially fetching a signal shifted out from each low speed memory to the shift registers and by judging normality of pattern to be inspected. CONSTITUTION:Numeral 8 indicates a high speed memory and binary coded signals obtained as a result of scanning change the terminals 72-75 of multiplexer 7 for each scanning of one line and are then sequentially stored in the memory cells 81-84. When these are stored up to the memory cell 84, these are stored again from the memory cell 81 and these memory cells 81-84 are used repeatedly. Meanwhile, when the signals are stored in the memory cells 81 and 82, the signals of scanning one line are respectively stored in the memory cells 511, 521 through the terminals 912, 922 of the multiplexers 91, 92. Thereafter, the signals of these memory cells 511, 521 are sequentially shifted to the next memory cells 512, 522. |