IC tester using an electron beam capable of easily setting a probe card unit for wafers & packaged IC's to be tested.

摘要

In an IC tester comprising a specimen chamber (31) and an electron optical column (34) for radiating an electron beam to a specimen placed in the specimen chamber, a fixed table (41) is attached to a Z table (39) in the specimen chamber (31). The fixed table is provided with downwardly protruding spring contact pins (61) which are connected to lead wires (55) led outside of the specimen chamber and arranged in a predetermined positional relation. A probe card unit (43) for testing a wafer or packaged IC is provided on the upper surface thereof with electric terminals which are arranged in the same positional relation as that of the spring contact pins. A probe card unit fixing mechanism (42) is attached to the undersurface of the fixed table (41). The fixing mechanism is so arranged that the probe card unit can be moved upward after it is inserted along the undersurface of the fixed table, bringing the spring contact pins into electrical contact with their corresponding probe card terminals. The probe card unit for testing the wafer has probes around an opening thereof for the passage of electron beams. The probes are connected to the probe card terminals. The probe card unit for testing the packaged IC has a socket for the packaged IC, whose terminals are connected to the probe card terminals.